A traditional servo rotary actuator consists of a rotor, stator, housing, bearings, end caps, and feedback components. A frameless motor removes all redundant mechanical structures and retains only the electromagnetic conversion core. The rotor becomes a direct part of the load shaft, while the stator is integrated into the machine structure through bonding, locking, or potting.

The core requirement of a five-axis rotary table is to achieve continuous and smooth cutting of complex spatial surfaces. This demands that the rotary table not only withstand cutting forces but also exhibit extremely high rigidity and absolute zero backlash. The Harmonic Servo Rotary Actuator fundamentally eliminates issues such as backlash, wear, and elastic deformation inherent in worm gear systems, making it the optimal choice for high-end five-axis rotary tables.

The linear rotary actuator (also known as the ZR actuator) is a highly integrated two-dimensional motion module that combines linear lifting (Z-axis) and 360° rotation (R-axis) functions. It uses a linear motor for precise linear motion and a servo motor to drive rotational motion. By combining the two axes, it can perform synchronized compound actions such as lifting, rotating, and angle calibration. It is ideal for high-precision applications such as semiconductor chip placement and precision assembly.

The backlash-free planetary rotary actuator typically integrates an internal rotor frameless torque motor with precision backlash-free planetary gearboxes, absolute encoders, and other components to form a complete rotary actuator unit. Its control system (drive unit) is usually externally mounted, enabling high-precision motion control for connected equipment. Compared to harmonic drive-based rotary actuators, this series employs high-rigidity backlash-free planetary gearboxes, offering superior stiffness, load capacity, and bending moment resistance. It is designed for applications demanding high rigidity, ultra-precision, and compact integration, such as machine tool rotary tables, precision medical devices, 5-axis laser cutting systems, and semiconductor equipment.